Moisture-resistant properties of SiNx films prepared by PECVD

journal article·1998-11

Hui Lin, Liqiang Xu, Xiang Chen, Xuhong Wang, Mei Sheng, Frank Stubhan, Karl-Heinz Merkel, Juergen Wilde

Thin Solid Films· Volume 333· Issue 1-2

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Abstract

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OpenAlex topics: Thin-Film Transistor Technologies · GaN-based semiconductor devices and materials · Semiconductor materials and devices

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