Nanocomposite Al2O3–ZrO2 thin films grown by reactive dual radio-frequency magnetron sputtering

Crystalline alumina–zirconia nanocomposites have been synthesized at 450 °C and 750 °C with reactive magnetron sputtering using radio-frequency power supplies. The composition of the films ranged from pure alumina to pure zirconia as measured by ion beam techniques. Microstructural characterization showed the presence of monoclinic zirconia in the pure zirconia films and γ-alumina in the pure alumina films while the nanocomposites contained either an amorphous compound, γ-alumina, cubic zirconia or a mixture of these. The grain size was ∼ 5 nm for the nanocomposite compared to larger grains in the pure oxide films. Electron energy loss spectroscopy showed a clear progression from the pure alumina to the pure zirconia.