Epitaxial growth of LiNbO3 thin films in a microwave oven

Abstract Oriented LiNbO 3 thin films were prepared using a polymeric precursor solution deposited on (0001) sapphire substrate by spin coating and crystallized in a microwave oven. Crystallization of the films was carried out in a domestic microwave oven. The influence of this type of heat treatment on the film orientation was analyzed by X-ray diffraction and electron channeling patterns, which revealed epitaxial growth of films crystallized at 550 and 650 °C for 10 min. A microstructural study indicated that the films treated at temperatures below 600 °C were homogeneous and dense, and the optical properties confirmed the good quality of these films.