Preparation of cubic and tetragonal Li7La3Zr2O12 film by metal organic chemical vapor deposition
Source abstract
Abstract
Abstract Li7La3Zr2O12 films were prepared on polycrystalline Al2O3 by metal organic chemical vapor deposition. The effect of deposition temperature (Tsub) on the phase formation, morphology and deposition rates was investigated. Tetragonal Li7La3Zr2O12 film formed at Tsub = 1023–1173 K. The morphology changed from small-sized granular, polygonally faceted granular to flat and smooth surface with increasing Tsub. Cubic Li7La3Zr2O12 film with fine granular surface was deposited at Tsub = 1173–1223 K. The deposition rates of the cubic and tetragonal Li7La3Zr2O12 films were approximately 20 μm h− 1, which were one to two orders of magnitude greater than those of Li7La3Zr2O12 films by pulsed laser deposition.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced Battery Materials and Technologies · Advancements in Battery Materials · Microwave Dielectric Ceramics Synthesis
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