journal article·1998-09

Preparation of SiO2 films with embedded Si nanocrystals by reactive r.f. magnetron sputtering

H. Seifarth, R. Grötzschel, A. Markwitz, W. Matz, P. Nitzsche, L. Rebohle

Thin Solid Films· Volume 330· Issue 2
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Abstract

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Research context

OpenAlex topics: Silicon Nanostructures and Photoluminescence · Thin-Film Transistor Technologies · Nanowire Synthesis and Applications

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