journal article·1998-11

The effect of sol viscosity on the sol–gel derived low density SiO2 xerogel film for intermetal dielectric application

Jung-Kyun Hong, Hong-Ryul Kim, Hyung-Ho Park

Thin Solid Films· Volume 332· Issue 1-2
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Abstract

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Research context

OpenAlex topics: Aerogels and thermal insulation · Mesoporous Materials and Catalysis · Silicone and Siloxane Chemistry

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References (15)

Show source-provided references
1. Case · Proc. ISMIC Conf. · 1995 · 104 · 116
2. Hrubesh · J. Non-Cryst. Solids · 1995 · 188 · 4610.1016/0022-3093(95)00028-3 ↗
3. Hrubesh · J. Mater. Res. · 1993 · 8 · 173610.1557/JMR.1993.1736 ↗
4. Hong · Thin Solid Films · 1997 · 308/309 · 49510.1016/S0040-6090(97)00486-0 ↗
5. Jo · Microelectron. Eng. · 1997 · 33 · 34310.1016/S0167-9317(96)00063-9 ↗
6. Jo · J. Appl. Phys. · 1997 · 82 · 129910.1063/1.365902 ↗
7. Brinker · J. Non-Cryst. Solids · 1982 · 48 · 4710.1016/0022-3093(82)90245-9 ↗
8. Prakash · J. Non-Cryst. Solids · 1995 · 190 · 26410.1016/0022-3093(95)00024-0 ↗
9. Mackens · Thin Solid Films · 1982 · 97 · 5310.1016/0040-6090(82)90416-3 ↗
10. Prakash · Nature · 1995 · 374 · 43910.1038/374439a0 ↗
11. C.J. Brinker, G.W. Scherer, Sol–Gel Science, Academic Press, San Diego, 1990, Ch. 9, p. 581.
12. Cho · Appl. Phys. Lett. · 1994 · 65 · 152510.1063/1.112032 ↗
13. Chang · J. Appl. Phys. · 1995 · 78 · 710310.1063/1.360418 ↗
14. Hwang · Appl. Phys. Lett. · 1995 · 67 · 6113
15. Cho · Appl. Phys. Lett. · 1998 · 72 · 139110.1063/1.121065 ↗