Nanometric-layered CrN/TiN thin films: mechanical strength and thermal stability

Nanometric-layered CrNyTiN coatings were deposited using unbalanced magnetron sputtering.The layered coating structure was characterised by X-ray diffractometry, and the mechanical properties were measured by nano-indentation and scratch test. High temperature annealing at 400–750 8C was carried out to investigate the thermal stability of the coating structure and mechanical properties.For comparison, samples of TiN and CrN deposited under similar conditions were also annealed and tested.The results showed that nano-layered CrN yTiN has excellent mechanical and thermal properties.Nano-hardness of 40 GPa and scratch adhesion of 80 N were achieved at a wavelength of 7.5 nm and a substrate bias of y80 V.The coating demonstrates application prospects in the stampingycutting tools industry. 2002 Elsevier Science B.V. All rights reserved.