article·2012-07-16

Barrier properties of Al2O3 and alucone coatings and nanolaminates on flexible biopolymer films

Mika Vähä‐Nissi, Pia Sundberg, Emilia Kauppi, Terhi Hirvikorpi, Jenni Sievänen, Anjali Sood, Maarit Karppinen, Ali Harlin

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Abstract

Thin atomic layer deposited (ALD) Al2O3 coatings are efficient barriers against gases and vapors. Al2O3 coatings are, however, brittle and straining them generates defects that impair barrier properties. Flexibility of ALD-grown Al2O3 coatings on biopolymer substrates can be improved by separating thinner Al2O3 layers with inorganic-organic alucone layers. The number and size of defects were smaller for these nanolaminates compared to the thick Al2O3 films after straining, and hence straining deteriorated the oxygen barrier properties less when applied to the laminates than when applied to the Al2O3 coatings.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Semiconductor materials and devices · Metal and Thin Film Mechanics · GaN-based semiconductor devices and materials

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