Transparent and conducting ZnO(:Al) films deposited by simultaneous RF- and DC-excitation of a magnetron
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OpenAlex topics: ZnO doping and properties · Thin-Film Transistor Technologies · Ion-surface interactions and analysis
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References (6)
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4. K. Ellmer, R. Wendt, R. Cebulla, Proc. 25th IEEE Photovoltaic Specialists Conf., Washington, DC, USA, May 1996.
5. Yeom · J. Appl. Phys. · 1989 · 65 · 381610.1063/1.343395 ↗
6. Ellmer · Thin Solid Films · 1994 · 247 · 1510.1016/0040-6090(94)90470-7 ↗