A ZnO nanorod based layered ZnO/64° YX LiNbO3 SAW hydrogen gas sensor

Abstract A zinc oxide (ZnO) nanorod based surface acoustic wave (SAW) sensor has been developed and investigated towards hydrogen (H 2 ) gas. The ZnO nanorods were deposited onto a layered ZnO/64° YX LiNbO 3 substrate using a liquid solution method. Micro-characterization results revealed that the diameters of ZnO nanorods are around 100 and 40 nm on LiNbO 3 and Au (metallization for electrodes), respectively. The sensor was exposed to different concentrations of H 2 in synthetic air at operating temperatures between 200 °C and 300 °C. The study showed that the sensor responded with highest frequency shift at 265 °C. At this temperature, stable baseline and fast response and recovery were observed.