Characteristics of TiN barrier layer against Cu diffusion
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Semiconductor materials and devices · Semiconductor materials and interfaces · Integrated Circuits and Semiconductor Failure Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (20)
Show source-provided references
1. Schnable · Proc. IEEE · 1967 · 56 · 1570
2. Learn · J. Electrochem. Soc. · 1976 · 123 · 89410.1149/1.2132964 ↗
3. J.F. Shackelford, Materials Science for Engineers, MacMillan, New York, 1988, p. 508.
4. H. Miyazaki, K. Hinode, Y. Homma, K. Mukai, Extend. Abstracts of 48th Full Meeting, Jpn. Soc. Appl. Phys., 1987, p. 329.
5. S.P. Murarka, Silicides for VLSI Applications, Academic, New York, 1983, p. 78.10.1016/B978-0-08-057056-3.50012-4 ↗
6. Weber · Appl. Phys. A · 1983 · 30 · 110.1007/BF00617708 ↗
7. Liotard · J. Appl. Phys. · 1985 · 57 · 189510.1063/1.334422 ↗
8. Li · J. Appl. Phys. · 1992 · 72 · 281010.1063/1.351533 ↗
9. Braud · Appl. Surf. Sci. · 1995 · 91 · 25110.1016/0169-4332(95)00127-1 ↗
10. Takeyama · Jpn. J. Appl. Phys. · 1996 · 35 · 402710.1143/JJAP.35.4027 ↗
11. Olowolate · Appl. Phys. Lett. · 1991 · 58 · 46910.1063/1.104610 ↗
12. Kaufmann · Appl. Surf. Sci. · 1995 · 91 · 29110.1016/0169-4332(95)00133-6 ↗
13. K.D. Childs, B.A. Carlson, L.A. LaVanier, J.F. Moulder, D.F. Paul, W.F. Stickle, D.G. Watson, in: C.L. Hedberg (Ed.), Handbook of Auger Electron Spectroscopy, Physical Electronics, Eden Prairie, 1995.
14. E.H. Nicollian, J.R. Brews, MOS Physics and Technology, Wiley, New York, 1982.
15. P.G. Shewmon, Diffusion in Solids, McGraw-Hill, New York, 1963.
16. B. Tuck, Introduction to Diffusion in Semiconductors, Peter Peregrinus, London, 1974.
17. K.-N. Tu, J.W. Mayer, L.C. Feldman, Electronic Thin Film Science for Electrical Engineers and Materials Scientists, Macmillan, New York, 1992.
18. McBrayer · J. Electrochem. Soc. · 1986 · 113 · 1243
19. Terman · Solid-State Electron. · 1962 · 5 · 28510.1016/0038-1101(62)90111-9 ↗
20. Lee · J. Kor. Vac. Soc. · 1996 · 5 · 333