Growth of epitaxial anatase (001) and (101) films

Abstract Anatase (TiO 2 ) films have been grown by oxygen plasma assisted molecular beam epitaxy. Reflection high-energy electron diffraction and low energy electron diffraction indicate that the films grow epitaxially with respect to the substrate. For (001) anatase films grown on SrTiO 3 (001) we have found that a (l×4) reconstruction is formed under growth conditions. On cooling to room temperature this reconstruction remains. The (101) anatase films were grown on a natural anatase (101) substrate. The natural substrate (i.e., mineral) was used due to the difficulty in obtaining good lattice matched materials for this surface orientation. X-Ray photoelectron spectroscopy results indicate that both surfaces are fully oxidized with Ti in the 4+ oxidation state.