article·1997-04-01

Influence of etch stops on the microstructure of porous silicon layers

S. Billat, M. Thönissen, R. Arens-Fischer, M. Berger, Michael Krüger, H. Lüth

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OpenAlex topics: Silicon Nanostructures and Photoluminescence · Semiconductor materials and devices · Nanowire Synthesis and Applications

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