Optical and structural properties of vanadium pentoxide films prepared by d.c. reactive magnetron sputtering

Abstract Vanadium pentoxide films were deposited onto glass substrates at different substrate temperatures (RT—400 °C) by d.c. reactive magnetron sputtering. The structural properties of the films were studied by X-ray diffraction, scanning electron microscopy and Raman spectra. The optical properties of the films were studied by measuring and fitting the transmittance. The film prepared at low temperature showed a high optical transmittance. The film prepared at the substrate temperature lower than 200 °C has an amorphous structure and the film prepared at substrate temperatures higher than 200 °C had a polycrystalline V 2 O 5 structure. The optical parameters of the films were calculated by fitting the transmittance using the classical model.