article·1989-09-01

Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide

Tadatsugu Minami, Hirotaka Sato, Hidehito Nanto, S. Takata

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OpenAlex topics: ZnO doping and properties · Gas Sensing Nanomaterials and Sensors · Plasma Diagnostics and Applications

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