journal article·1997-07

The chemistry, structure, and resulting wear properties of magnetron-sputtered NbN thin films

K.S. Havey, J.S. Zabinski, S.D. Walck

Thin Solid Films· Volume 303· Issue 1-2
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Abstract

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Research context

OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Semiconductor materials and devices

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References (19)

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