A solid-state electrolyte lithium phosphorus oxynitride film prepared by pulsed laser deposition

Lithium phosphorus oxynitride (LiPON) thin film as a lithium electrolyte was successfully prepared by ultraviolet (355 nm) pulsed laser deposition in an ambient N2 gas for the first time. The ionic conductivity of the deposited LiPON film strongly depends on the laser fluence and the ambient N2 gas pressure. AC impedance data of LiPON thin film were measured at different temperatures, and an ionic conductivity of 1.6×10−6 S/cm at 25 °C was obtained with conductivity activation energy of 0.58 eV. The structure, composition and morphology of the deposited LiPON films were characterized by X-ray diffraction, scanning electron microscopy, energy dispersive X-ray analysis and X-ray photoelectron spectroscopy.