journal article·2008-12

Mechanical properties and oxidation behaviour of (Al,Cr)N and (Al,Cr,Si)N coatings for cutting tools deposited by HPPMS

K. Bobzin, N. Bagcivan, P. Immich, S. Bolz, R. Cremer, T. Leyendecker

Thin Solid Films· Volume 517· Issue 3
Publisher page

Abstract

Abstract Hard coatings with high hardness, high oxidation resistance and thermal stability are used for economical machining. In this regard nanostructured (Cr,Al)N and nc-(Cr,Al)N/a-Si 3 N 4 films were sputtered on tungsten carbide tools and WC/Co samples by using the HPPMS (High Power Pulse Magnetron Sputtering) technology. The relationship between coating composition, microstructure and mechanical properties was investigated by using X-ray diffraction, Scanning Electron Microscopy (SEM), and Nanoindentation. The maximum hardness value was about 40 GPa. For the coatings the Al-content was varied from 10–90 at.% while the silicon content was about 5 at.% for the (Cr,Al,Si)N. As this study focuses on oxidation behaviour of the deposited coatings, annealing tests were carried out in air at 1000 °C. HPPMS is a promising technology to ensure a uniform coating distribution, especially for complex shaped substrates like cutting tools or moulds. SEM pictures of the cross section have been taken around the cutting edge to determine the deposition rate and the film growth. The coatings morphology has been compared to m. f. (middle frequency)- and d. c. (direct current)-sputtered nanocomposite (Cr,Al,Si)N films indicating enhanced properties due to the application of the HPPMS-technology with regard to denser structure, higher hardness, favourable surface topography and better thickness uniformity.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (34)

Show source-provided references
1. Hasegawa · Surf. Coat. Technol. · 2007 · 201 · 547710.1016/j.surfcoat.2006.07.016 ↗
2. Rafaja · Mat. Sci. Eng. · 2007 · 462 · 27910.1016/j.msea.2005.11.086 ↗
3. Faga · Wear · 2007 · 7–12 · 130610.1016/j.wear.2007.01.109 ↗
4. Dobrzanski · J. Mat. Proc. Technol. · 2004 · 157–158 · 33110.1016/j.jmatprotec.2004.09.052 ↗
5. Kim · Surf. Coat. Technol. · 2007 · 201 · 522310.1016/j.surfcoat.2006.07.118 ↗
6. Castaldi · Surf. Coat. Technol. · 2007 · 202 · 78110.1016/j.surfcoat.2007.05.070 ↗
7. Martinez · Surf. Coat. Technol. · 2004 · 180–181 · 57010.1016/j.surfcoat.2003.10.121 ↗
8. Park · Surf. Coat. Technol. · 2004 · 188–189 · 42510.1016/j.surfcoat.2004.08.045 ↗
9. Martinez · Thin Solid Films · 2004 · 447–448 · 33210.1016/S0040-6090(03)01113-1 ↗
10. Yamamoto · Surf. Coat. Technol. · 2005 · 193 · 16710.1016/j.surfcoat.2004.08.150 ↗
11. Mercs · Surf. Coat. Technol. · 2005 · 200 · 40310.1016/j.surfcoat.2005.02.214 ↗
12. Lee · Surf. Coat. Technol. · 2005 · 200 · 102610.1016/j.surfcoat.2005.02.006 ↗
13. Thobor-Keck · Surf. Coat. Technol. · 2005 · 200 · 26410.1016/j.surfcoat.2005.02.029 ↗
14. Kim · Surf. Coat. Technol. · 2005 · 200 · 181410.1016/j.surfcoat.2005.08.059 ↗
15. Sandu · Surf. Coat. Technol. · 2006 · 201 · 408310.1016/j.surfcoat.2006.08.100 ↗
16. Park · Surf. Coat. Technol. · 2007 · 201 · 522310.1016/j.surfcoat.2006.07.118 ↗
17. Lee · Thin Solid Films · 2006 · 506–507 · 19210.1016/j.tsf.2005.08.027 ↗
18. Rafaja · Surf. Coat. Technol. · 2007 · 201 · 947610.1016/j.surfcoat.2007.04.007 ↗
19. Alami · J. Vac. Sci. Technol. · 2005 · 23 · 27810.1116/1.1861049 ↗
20. K. Bobzin, N. Bagcivan, P. Immich, S. Bolz, J.Alami, R. Cremer, J. Mat. Proc. Technol (in press), doi:10.1016/j.jmatprotec.2008.01.035.10.1016/j.jmatprotec.2008.01.035 ↗
21. Kouznetsov · Surf. Coat. Technol. · 1999 · 122 · 29010.1016/S0257-8972(99)00292-3 ↗
22. Gudmundsson · Appl. Phys. Lett. · 2001 · 78 · 432710.1063/1.1376150 ↗
23. Gudmundsson · Surf. Coat. Technol. · 2002 · 161 · 24910.1016/S0257-8972(02)00518-2 ↗
24. Helmersson · Thin Solid Films · 2006 · 513 · 110.1016/j.tsf.2006.03.033 ↗
25. Macák · J. Vac. Sci. Technol. A, · 2000 · 18 · 153310.1116/1.582380 ↗
26. Alami · Plasma Sources Sci. Technol. · 2005 · 14 · 52510.1088/0963-0252/14/3/015 ↗
27. Hovsepian · Surf. Coat. Technol. · 2006 · 201 · 410510.1016/j.surfcoat.2006.08.027 ↗
28. Purandare · J. Vac. Sci. Technol. A · 2008 · 26 · 28810.1116/1.2839855 ↗
29. Oliver · J. Mat. Res. · 1992 · 7 · 156410.1557/JMR.1992.1564 ↗
30. Alami · Thin Solid Films · 2006 · 515 · 173110.1016/j.tsf.2006.06.015 ↗
31. Willmann · Scripta Materialia · 2006 · 54 · 184710.1016/j.scriptamat.2006.02.023 ↗
32. Reiter · J. Vac. Sci. Technol. · 2007 · 25 · 71110.1116/1.2738492 ↗
33. J. Lin, B. Mishra, J.J. Moore, W.D. Sproul, Surf. Coat. Technol. 202 (14) (2008) 3272.10.1016/j.surfcoat.2007.11.037 ↗
34. Lin · Surf. Coat. Technol. · 2007 · 201 · 696010.1016/j.surfcoat.2006.12.026 ↗