Microstructure and properties of TiAlSiN coatings prepared by hybrid PVD technology

TiAlSiN coatings with different Si content were prepared by hollow cathode discharge (HCD) and mid-frequency magnetron sputtering (MFMS) hybrid coating deposition technology. The chemical composition, microstructure, mechanical properties of these coatings were systematically investigated by means of energy dispersive spectrometry (EDS), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), nanoindentation measurement, scratch and high speed milling hardened steel tests. The coatings prepared by this method showed the structure of crystalline phase was corresponding to that of TiAlN, however, different preferred orientation with addition of Si. Proper content of Si into TiAlN led to increase of microhardness and adhesion. TiAlSiN coated end mill with Si content of 4.78 at.% had the least flank wear, which was improved about 20% milling distance than TiAlN coated end mill.