Atmospheric pressure chemical vapour deposition of SnSe and SnSe2 thin films on glass

Abstract Atmospheric pressure chemical vapour deposition of tin monoselenide and tin diselenide films on glass substrate was achieved by reaction of diethyl selenide with tin tetrachloride at 350–650 °C. X-ray diffraction showed that all the films were crystalline and matched the reported pattern for SnSe and/or SnSe2. Wavelength dispersive analysis by X-rays show a variable Sn:Se ratio from 1:1 to 1:2 depending on conditions. The deposition temperature, flow rates and position on the substrate determined whether mixed SnSe–SnSe2, pure SnSe or pure SnSe2 thin films could be obtained. SnSe films were obtained at 650 °C with a SnCl4 to Et2Se ratio greater than 10. The SnSe films were silver–black in appearance and adhesive. SnSe2 films were obtained at 600–650 °C they had a black appearance and were composed of 10 to 80 μm sized adherent crystals. Films of SnSe only 100 nm thick showed complete absorbtion at 300–1100 nm.