Dependence of oxygen flow on optical and electrical properties of DC-magnetron sputtered ITO films

journal article·1998-08

M Bender, W Seelig, C Daube, H Frankenberger, B Ocker, J Stollenwerk

Thin Solid Films· Volume 326· Issue 1-2

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OpenAlex topics: ZnO doping and properties · Advanced Sensor Technologies Research · Surface Roughness and Optical Measurements

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