Study of structure and optical properties of silver oxide films by ellipsometry, XRD and XPS methods

Ag O samples prepared in different O gas ratio conditions and annealed at different temperatures have been studied by the x 2 spectroscopic ellipsometry, XRD and XPS methods.The optimal O y(O qAr) gas ratio for the sample preparation will be in the 22 range 0.5–0.6, in which the optical constants become less changed. During annealing, the as-deposited amorphous structure of Ag O will be crystallized and the temperature-dependent decomposition will occur.The threshold of the decomposition temperature x for AgO and Ag O is approximately 200 8C and 300 8C, respectively.The results indicate that the samples annealed at the low 2 and high O y(O qAr) gas ratio will have different structures, and the structure of Ag O is more stable with a lower oxygen 22 2 diffusion rate in decomposition for the sample prepared in the higher O gas ratio condition. 2