Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction

Measurements of residual stresses in textured thin films have always been problematic. In this article, a new experimental method using grazing-incidence X-ray diffraction is presented with its principles based upon the conventional sin c method. 2 Instead of using the Bragg–Brentano (B-B) or Seemann–Bohlin geometry, the proposed method utilizes an asymmetrical diffraction geometry for which the X-ray beam is incident at a grazing angle g to the sample surface, while the angle c is the tilt angle of the sample surface as defined by the conventional sin c method. Basicequations involved in the X-ray residual 2