Effects of sputtering power on photocatalytic properties of TiO_2 deposited fabrics

Nanoscale titanium dioxide(TiO2) functional films were prepared on the surface of spun-bonded nonwoven polyester fabric at room temperature by DC reactive magnetron sputtering process.The surface morphology and the structural properties of TiO2 films deposited under different sputtering powers were characterized by X-ray photoelectron spectroscopy,X-ray diffraction and atomic force microscopy.The deposition rate and photocatalytic properties of the fabrics with TiO2 films prepared under different sputtering powers were analyzed.The test results showed that as the sputtering power increased within a certain range,the deposition rate and sputtering efficiency increased,the uniformity and compactness of the TiO2 films improved,and the photocatalytic activity of the polyester nonwoven fabric with TiO2 films enhanced,with little influence on chemical structure of the TiO2 films.However,if the sputtering power was too high,it could lead to not only overheating and damage of the target,but decrease of the deposition rate and uniformity of TiO2 films.