Smart textiles: an explorative study of the use of magnetron sputter deposition
Source abstract
Abstract
Reactive magnetron sputtering is a widely used deposition technique in different application areas. In this study its use is evaluated for the deposition of metal thin films (Al, Cu and Ti) and oxide thin films (Al 2 O 3 , TiO x ) on woven and nonwoven substrates. The study shows that good adhesion can only be achieved when the substrate is pre-treated in a glow discharge. The influence of the substrate on the reflectivity of Al and Cu thin films was investigated. For conductive textile applications, the resistivity of metal thin films and TiO x was investigated.
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Research context
OpenAlex topics: Advanced Measurement and Detection Methods · Surface Roughness and Optical Measurements · Material Properties and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Research group DRAFT, Department of Solid State Sciences, Ghent University, Belgium,
Research group DRAFT, Department of Solid State Sciences, Ghent University, Belgium
Textile Department and Research Lab TO2C, University College Ghent, Belgium
References (16)
Show source-provided references
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