6FDA-ODA waveguides etched by ion shrinkage

Abstract Fluorinated polyimides exhibit accurate properties for transport of light without significant losses. 6FDA-ODA is here used as bulk materials for the fabrication of low cost wave-guides in the field of optical telecommunications. Dry etching of the polymer is carried out by means of ion shrinkage with energetic ions ( E >50 keV). As ion bombarded polymers show losses higher than 2.3 db/cm, the choice has been made to elaborate salient guides of virgin 6FDA-ODA. The fabrication conditions are presented. We then discuss about the wave-guiding properties of the polymer structures.