Ion beam assisted etching of a fluorinated polyimide in order to insert it in an electro-optical system
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Abstract
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Research context
OpenAlex topics: Analytical Chemistry and Sensors · Surface Modification and Superhydrophobicity · Copper Interconnects and Reliability
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References (6)
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1. Harper · Ann. Rev. Mater. Sci. · 1983 · 13 · 41310.1146/annurev.ms.13.080183.002213 ↗
2. Booth · 1993 · 549
3. Geis · .1. Vac. Sci. Technol. · 1981 · 19 · 139010.1116/1.571216 ↗
4. Lincoln · J. Vac. Sci. Technol. · 1982 · 20 · 78610.1116/1.571483 ↗
5. Lincoln · J. Vac. Sci. Technol.B · 1983 · 1 · 410.1116/1.582671 ↗
6. B. Lucas, C. Moussant, A. Moliton, J. Zyss, Polymer International, (in press).