Preparation of thin hydrogenated carbon and silicon-carbon layers
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Abstract
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Semiconductor materials and devices · Metal and Thin Film Mechanics
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References (8)
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1. Hamann · Vacuum · 1984 · 34 · 105310.1016/0042-207X(84)90223-9 ↗
2. Porsch · Diploma Thesis · 1988 · 40
3. Manifacier · J. Phys. E: Sci. Instrum. · 1976 · 9 · 100210.1088/0022-3735/9/11/032 ↗
4. Tauc · 1972 · 270
5. Dietrich · Thesis · 1983 · 69
6. Hänsel · Acta Polym. · 1980 · 31 · 19310.1002/actp.1980.010310311 ↗
7. Memming · Thin Solid Films · 1986 · 143 · 27910.1016/0040-6090(86)90181-1 ↗
8. Has · Arch. Nauki Materialakh · 1986 · 7 · 131