Soft Three-Dimensional Microscale Vibratory Platforms for Characterization of Nano-Thin Polymer Films
Abstract
Research context
OpenAlex topics: Mechanical and Optical Resonators · Advanced MEMS and NEMS Technologies · Force Microscopy Techniques and Applications
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Affiliations
Department of Mechanical Science and Engineering, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States
Department of Civil and Environmental Engineering, Mechanical Engineering, Materials Science and Engineering, and Center for Bio-Integrated Electronics, Northwestern University, Evanston, Illinois 60208, United States
Department of Aerospace Engineering, Pennsylvania State University, State College, Pennsylvania 16802, United States
Department of Chemistry, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States
School of Naval Architecture, Ocean and Civil Engineering (State Key Laboratory of Ocean Engineering), Shanghai Jiaotong University, Shanghai 200000, China
Center for Flexible Electronics Technology and Center for Mechanics and Materials; AML, Department of Engineering Mechanics, Tsinghua University, Beijing 100084, China
Center for Bio-Integrated Electronics, Department of Materials Science and Engineering, Biomedical Engineering, Chemistry, Mechanical Engineering, Electrical Engineering, and Computer Science, and Neurological Surgery, Simpson Querrey Institute for Nano/biotechnology, McCormick School of Engineering, and Feinberg School of Medicine, Northwestern University, Evanston, Illinois 60208, United States
Department of Materials Science and Engineering, Frederick Seitz Materials Research Laboratory, and Beckman Institute for Advanced Science and Technology, University of Illinois at Urbana−Champaign, Urbana, Illinois 61801, United States
Funding
Basic Energy Sciences · Tsinghua National Laboratory for Information Science and Technology · Division of Graduate Education · Division of Civil, Mechanical and Manufacturing Innovation · National Natural Science Foundation of China · International Institute for Nanotechnology, Northwestern University