journal article·2019-01-22

Ultrathin, Transferred Layers of Metal Silicide as Faradaic Electrical Interfaces and Biofluid Barriers for Flexible Bioelectronic Implants

Jinghua Li, Rui Li, Haina Du, Yishan Zhong, Yisong Chen, Kewang Nan, Sang Min Won, Jize Zhang, Yonggang Huang, John A. Rogers

ACS Nano· Volume 13· Issue 1
Publisher page

Abstract

Actively multiplexed, flexible electronic devices represent the most sophisticated forms of technology for high-speed, high-resolution spatiotemporal mapping of electrophysiological activity on the surfaces of the brain, heart, and other organ systems. Materials that simultaneously serve as long-lived, defect-free biofluid barriers and sensitive measurement interfaces are essential for chronically stable, high-performance operation. Recent work demonstrates that conductively coupled electrical interfaces of this type can be achieved based on the use of highly doped monocrystalline silicon electrical “via” structures embedded in insulating nanomembranes of thermally grown silica. A limitation of this approach is that dissolution of the silicon in biofluids limits the system lifetimes to 1–2 years, projected based on accelerated testing. Here, we introduce a construct that extends this time scale by more than a factor of 20 through the replacement of doped silicon with a metal silicide alloy (TiSi2). Systematic investigations and reactive diffusion modeling reveal the details associated with the materials science and biofluid stability of this TiSi2/SiO2 interface. An integration scheme that exploits ultrathin, electronic microcomponents manipulated by the techniques of transfer printing yields high-performance active systems with excellent characteristics. The results form the foundations for flexible, biocompatible electronic implants with chronic stability and Faradaic biointerfaces, suitable for a broad range of applications in biomedical research and human healthcare.
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Research context

OpenAlex topics: Neuroscience and Neural Engineering · Photoreceptor and optogenetics research · Conducting polymers and applications

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States

Frederick Seitz Materials Research Laboratory, Department of Materials Science and Engineering, University of Illinois at Urbana—Champaign, Urbana, Illinois 61801, United States

State Key Laboratory of Structural Analysis for Industrial Equipment, Department of Engineering Mechanics, International Research Center for Computational Mechanics, Dalian University of Technology, Dalian 116024, P.R. China

Department of Mechanical Science and Engineering, Frederick Seitz Materials Research Laboratory, University of Illinois at Urbana—Champaign, Urbana, Illinois 61801, United States

Department of Mechanical Engineering, Civil and Environmental Engineering, and Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States

Center for Bio-Integrated Electronics, Departments of Biomedical Engineering, Neurological Surgery, Chemistry, Mechanical Engineering, Electrical Engineering and Computer Science, Simpson Querrey Institute for Nano/biotechnology, Northwestern University, Evanston, Illinois 60208, United States

Funding

Defense Advanced Research Projects Agency · China Association for Science and Technology · State Key Laboratory of Nonlinear Mechanics · Center for Bio-Integrated Electronics, Northwestern University

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