Effect of Fabrication-Dependent Shape and Composition of Solid-State Nanopores on Single Nanoparticle Detection

Solid-state nanopores can be fabricated in a variety of ways and form the basis for label-free sensing of single nanoparticles: as individual nanoparticles traverse the nanopore, they alter the ionic current across it in a characteristic way. Typically, nanopores are described by the diameter of their limiting aperture, and less attention has been paid to other, fabrication-dependent parameters. Here, we report a comprehensive analysis of the properties and sensing performance of three types of nanopore with identical 50 nm aperture, but fabricated using three different techniques: direct ion beam milling, ion beam sculpting, and electron beam sculpting. The nanopores differ substantially in physical shape and chemical composition as identified by ion-beam assisted cross-sectioning and energy dispersive X-ray spectroscopy. Concomitant differences in electrical sensing of single 30 nm beads, such as variations in blockade depth, duration, and electric field dependence, are observed and modeled using hydrodynamic simulations. The excellent agreement between experiment and physical modeling shows that the physical properties (shape) and not the chemical surface composition determine the sensing performance of a solid-state nanopore in the absence of deliberate surface modification. Consequently, nanoparticle sensing performance can be accurately predicted once the full three-dimensional structure of the nanopore is known.