journal article·2023-11

High thermal stability of the reflectivity of Be/Al multilayer mirrors designed for extreme ultraviolet wavelength

Niranjan Kumar, Kalpataru Panda, Roman S Pleshkov, Aleksey V Nezhdanov, Vladimir N Polkovnikov, Pavel A Yunin, Nikolay I Chkhalo

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OpenAlex topics: Photorefractive and Nonlinear Optics · Advanced Chemical Physics Studies · High-pressure geophysics and materials

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References (29)

Show source-provided references
1. Investigation of microstructure and reflectivity of thermally annealed Mo/Be and W/Be multilayer mirrors10.1016/j.surfin.2021.101656 ↗
2. Phase analysis of tungsten and phonon behavior of beryllium layers in W/Be periodic multilayers10.1039/D1CP02815D ↗
3. Investigation of transverse optical phonon of thin Si films embedded in periodic Mo/Si and W/Si multilayer mirrors10.1016/j.surfin.2021.101270 ↗
4. Structural and residual stress changes in Mo/a-Si multilayer thin films with annealing10.1007/BF01152937 ↗
5. Microstructure and phonon behavior in W/Si periodic multilayer structures10.1088/1361-6463/ac4729 ↗
6. Phonon, plasmon and electronic properties of surfaces and interfaces of periodic W/Si and Si/W multilayers10.1039/D1CP01986D ↗
7. Stress relaxation in Mo/Si multilayer structures10.1063/1.106771 ↗
8. Temperature induced diffusion in Mo/Si multilayer mirrors10.1063/1.367258 ↗
9. Model for stress and volume changes of a thin film on a substrate upon annealing: application to amorphous Mo/Si multilayers10.1103/PhysRevB.44.13519 ↗
10. Nucleation, growth and transformation of amorphous and crystalline solidsd condensing from the gas phase10.1007/BF00643495 ↗
11. Amorphous nucleation in metals10.1038/213277c0 ↗
12. Microstructural transformation of nanoscale Be layers in the Mo/Be and Be/Mo periodic multilayer mirrors10.1021/acs.jpcc.0c10210 ↗
13. Raman spectra of beryllium to 23GPa
14. X-ray diffraction and Raman studies of beryllium: static and elastic properties at high pressures10.1103/PhysRevB.72.094113 ↗
15. Periodic multilayer for X-ray spectroscopy in the Li K range10.3390/app11146385 ↗
16. Beryllium-based multilayer Mirrors and filters for the extreme ultraviolet range10.1166/jnn.2019.16474 ↗
17. Be/Al-based multilayer mirrors with improved reflection and spectral selectivity for solar astronomy above 17nm wavelength10.1016/j.tsf.2017.04.020 ↗
18. Beryllium-based multilayer x-ray optics10.3367/UFNe.2019.05.038623 ↗
19. Extended model for the reconstruction of periodic multilayers from extreme ultraviolet and X-ray reflectivity data10.1107/S1600576717012286 ↗
20. Data-reduction procedure for correction of geometric factors in the analysis of specular X-ray reflectivity of small samples10.1107/S1600576718010579 ↗
21. The correction of geometrical factors in the analysis of X-ray reflectivity10.1107/S0108767392013126 ↗
22. Laboratory methods for investigations of multilayer mirrors in extreme ultraviolet and soft x-ray region10.1117/12.556949 ↗
23. A Study of strain-driven nucleation and extension of deformed grain: phase field crystal and continuum modeling10.3390/ma11101805 ↗
24. Raman microscopy investigation of beryllium materials10.1088/0031-8949/T167/1/014027 ↗
25. Oxygen vibrations and acoustic surface plasmon on Be(0001)10.1103/PhysRevB.86.085453 ↗
26. Raman Spectroscopy of BeO at low temperatures10.1002/jrs.1250220602 ↗
27. Effects of Al film thickness and annealing temperature on the aluminum-induced crystallization of amorphous silicon and carrier mobility10.1016/j.actamat.2011.06.020 ↗
28. Influence of synthesis parameters and thermal annealing on grain size of polycrystalline aluminum thin film10.1088/1742-6596/2119/1/012121 ↗
29. Properties of physically deposited thin aluminum film coatings: a review10.1016/j.jallcom.2018.03.006 ↗