Binary Pt–Si Nanostructures Prepared by Focused Electron-Beam-Induced Deposition
Source abstract
Abstract
Binary systems of Pt-Si are prepared by electron-beam-induced deposition using the two precursors, trimethyl(methylcyclopentadienyl)platinum(IV) (MeCpPt(Me)(3)) and neopentasilane (Si(SiH(3))(4)), simultaneously. By varying the relative flux of the two precursors during deposition, we are able to study composites containing platinum and silicon in different ratios by means of energy-dispersive X-ray spectroscopy, atomic force microscopy, electrical transport measurements, and transmission electron microscopy. The results show strong evidence for the formation of a binary, metastable Pt(2)Si(3) phase, leading to a maximum in the conductivity for a Si/Pt ratio of 3:2.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Semiconductor materials and interfaces · Integrated Circuits and Semiconductor Failure Analysis · Advanced Electron Microscopy Techniques and Applications
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Physikalisches Institut, ‡Institut für Biophysik, and §Institut für Anorganische und Analytische Chemie, Goethe Universität, 60438 Frankfurt am Main, Germany.
References (39)
Show source-provided references
1. Liang T. · J. Vac. Sci. Technol., B · 2005 · 23 · 310110.1116/1.2062428 ↗
2. Klein K. L. · Nanotechnology · 2008 · 19 · 34570510.1088/0957-4484/19/34/345705 ↗
3. Danelon C. · Langmuir · 2006 · 22 · 1071110.1021/la061321c ↗
4. Gabureac M. · Nanotechnology · 2010 · 21 · 11550310.1088/0957-4484/21/11/115503 ↗
5. Fernández-Pacheco A. · Appl. Phys. Lett. · 2009 · 94 · 19250910.1063/1.3139068 ↗
6. Serrano-Ramón L. · ACS Nano · 2011 · 5 · 778110.1021/nn201517r ↗
7. Schwalb C. H. · Sensors · 2010 · 10 · 984710.3390/s101109847 ↗
8. Beloborodov I. S. · Rev. Mod. Phys. · 2007 · 79 · 46910.1103/RevModPhys.79.469 ↗
9. Porrati F. · J. Appl. Phys. · 2011 · 109 · 06371510.1063/1.3559773 ↗
10. Efetov K. B. · Europhys. Lett. · 2002 · 59 · 11410.1209/epl/i2002-00166-9 ↗
11. Porrati F. · Nanotechnology · 2010 · 21 · 37530210.1088/0957-4484/21/37/375302 ↗
12. Sachser R. · Phys. Rev. B · 2009 · 80 · 19541610.1103/PhysRevB.80.195416 ↗
13. Sachser, R.; Porrati, F.; Schwalb, C. H.; Huth, M.Evidence for Universal Conductance Correction in a Tunable Strongly Coupled Nanogranular Metal.Phys. Rev. Lett. 2011, 107, 206803.10.1103/PhysRevLett.107.206803 ↗
14. Fernández-Pacheco A. · Phys. Rev. B · 2009 · 79 · 17420410.1103/PhysRevB.79.174204 ↗
15. Huth M. · New J. Phys. · 2009 · 11 · 03303210.1088/1367-2630/11/3/033032 ↗
16. Liu Y. · Phys. Rev. B · 1993 · 47 · 593110.1103/PhysRevB.47.5931 ↗
17. Markovic N. · Phys. Rev. B · 1999 · 60 · 432010.1103/PhysRevB.60.4320 ↗
18. Frydman A. · Phys. Rev. B · 2002 · 66 · 05250910.1103/PhysRevB.66.052509 ↗
19. Zhang S. L. · Crit. Rev. Solid State Mater. Sci. · 2003 · 28 · 110.1080/10408430390802431 ↗
20. Chen L. J. · JOM · 2005 · 57 · 2410.1007/s11837-005-0111-4 ↗
21. Botman A. · J. Vac. Sci. Technol., B · 2008 · 26 · 246010.1116/1.2976576 ↗
22. Porrati F. · Nanotechnology · 2009 · 20 · 19530110.1088/0957-4484/20/19/195301 ↗
23. Beloborodov I. S. · Europhys. Lett. · 2005 · 69 · 43510.1209/epl/i2004-10355-6 ↗
24. Feigel’man M. V. · JETP Lett. · 2005 · 81 · 27710.1134/1.1931015 ↗
25. Tran T. B. · Phys. Rev. Lett. · 2005 · 95 · 07680610.1103/PhysRevLett.95.076806 ↗
26. Li J. T. · J. Appl. Phys. · 2010 · 107 · 10354010.1063/1.3428427 ↗
27. Che R. C. · Appl. Phys. Lett. · 2005 · 87 · 22310910.1063/1.2136071 ↗
28. Huth M. · J. Appl. Phys. · 2010 · 107 · 11370910.1063/1.3443437 ↗
29. Liu H. · ACS Nano · 2010 · 4 · 521110.1021/nn101376u ↗
30. Tsaur B. Y. · J. Appl. Phys. · 1980 · 51 · 532610.1063/1.327446 ↗
31. Tsaur B. Y. · J. Appl. Phys. · 1980 · 51 · 533410.1063/1.327447 ↗
32. Graczyk J. F. · J. Appl. Phys. · 1982 · 53 · 677210.1063/1.329999 ↗
33. Okamoto H. · J. Phase Equilib. · 1995 · 16 · 28610.1007/BF02667320 ↗
34. Klingenberger D. · J. Vac. Sci. Technol., A · 2009 · 27 · 120410.1116/1.3196789 ↗
35. Kaczmarczyk A. · J. Am. Chem. Soc. · 1960 · 82 · 75110.1021/ja01488a069 ↗
36. Kaczmarczyk A. · J. Inorg. Nucl. Chem. · 1961 · 17 · 18610.1016/0022-1902(61)80212-1 ↗
37. Kaczmarczyk A. · J. Inorg. Nucl. Chem. · 1964 · 26 · 42110.1016/0022-1902(64)90006-5 ↗
38. Nuss J. W. · J. Inorg. Nucl. Chem. · 1964 · 26 · 43510.1016/0022-1902(64)90008-9 ↗
39. Urry G. · Acc. Chem. Res. · 1970 · 3 · 30610.1021/ar50033a004 ↗