SPECTROSCOPIC ELLIPSOMETRY ANALYSIS OF A ANTIMONY TRISULFIDE (Sb2S3) THIN FILM

In the present research paper, thin films of antimony trisulfide (Sb2S3) were successfully deposited on glass substrates. The effect of thickness on the structural and optical properties of antimony trisulfide (Sb2S3) thin films is studied. The optical constants (n, k) and film thicknesses of Sb2S3 thin films were obtained by fitting the ellipsometric parameters ( and ) data using three-layer model systems in the wavelength range of 400–1800 nm. It is found that the refractive index n increases with an increase of the film thickness. The structural investigations are performed by Scanning electron microscopy SEM (the Grain size increased with the film thickness). We demonstrate generalized ellipsometry for precise measurement of the principal indices of refraction and the extinction coefficients.