journal article·2019-01

Fracture resistance of Ti-Ag thin films deposited on polymeric substrates for biosignal acquisition applications

Aurélien Etiemble, Claudia Lopes, Galy Ingrid Nkou Bouala, Joel Borges, Annie Malchère, Cyril Langlois, Filipe Vaz, Philippe Steyer

Publisher page

Abstract

Abstract The ability of magnetron sputtered Ti-Ag thin films deposited on polymeric substrate to be used as sensors for biosignal acquisition is investigated. Influence of the Ag content on the microstructure of TiAgx thin films prepared by magnetron sputtering is characterized by X-ray diffraction and electron microscopies. Three characteristic composition ranges are identified: Ti-rich, Ti-Ag and Ag-rich thin films. Their mechanical and electrical properties are then evaluated. Thin film fracture resistance on polymer substrate (polyethylene terephthalate) is studied by scanning electron microscopy micrographs performed during an in situ uniaxial stretching test. The key role of thin film composition and microstructure is highlighted, pointing out the positive effect of silver.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Metal and Thin Film Mechanics · Titanium Alloys Microstructure and Properties · Bone Tissue Engineering Materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (47)

Show source-provided references
1. Jones · 2010
2. Biosensor technology: recent advances in threat agent detection and medicine10.1039/c3cs60141b ↗
3. Recent developments and trends in biomedical sensors10.1016/j.measurement.2004.11.002 ↗
4. Webster · 2006
5. Nanostructured functional Ti–Ag electrodes for large deformation sensor applications10.1016/j.sna.2014.09.031 ↗
6. Evolution of the functional properties of titanium–silver thin films for biomedical applications: influence of in-vacuum annealing10.1016/j.surfcoat.2014.11.020 ↗
7. Planar electrochemical sensors for biomedical applications10.1016/j.medengphy.2006.05.006 ↗
8. Multifunctional Ti–Me (Me = Al, Cu) thin film systems for biomedical sensing devices10.1016/j.vacuum.2015.05.015 ↗
9. TiAgx thin films for lower limb prosthesis pressure sensors: effect of composition and structural changes on the electrical and thermal response of the films10.1016/j.apsusc.2013.07.021 ↗
10. Study of the electrical behavior of nanostructured Ti–Ag thin films, prepared by Glancing Angle Deposition10.1016/j.matlet.2015.05.067 ↗
11. Electrical characterization of Ag:TiN thin films produced by glancing angle deposition10.1016/j.matlet.2013.10.044 ↗
12. Ti1−xAgx electrodes deposited on polymer based sensors10.1016/j.apsusc.2014.08.142 ↗
13. Nanocomposite Ag:TiN thin films for dry biopotential electrodes10.1016/j.apsusc.2013.07.154 ↗
14. Innovative Zr-Cu-Ag thin film metallic glass deposed by magnetron PVD sputtering for antibacterial applications10.1016/j.jallcom.2016.12.259 ↗
15. Silver influence on the antibacterial activity of multi-functional Zr-Cu based thin film metallic glasses10.1016/j.surfcoat.2017.10.057 ↗
16. Protective Ag:TiO2 thin films for pressure sensors in orthopedic prosthesis: the importance of composition, structural and morphological features on the biological response of the coatings10.1007/s10856-014-5251-z ↗
17. Influence of the surface properties on bactericidal and fungicidal activity of magnetron sputtered Ti–Ag and Nb–Ag thin films10.1016/j.msec.2016.01.029 ↗
18. Antimicrobial titanium/silver PVD coatings on titanium10.1186/1475-925X-5-22 ↗
19. Fracture and delamination of chromium thin films on polymer substrates10.1007/s11661-009-9988-9 ↗
20. Mechanical analysis of ultrathin oxide coatings on polymer substrates in situ in a scanning electron microscope10.1016/S0040-6090(03)00613-8 ↗
21. Adhesion of silicon oxide layers on poly(ethylene terephthalate). I: effect of substrate properties on coating's fragmentation process10.1002/(SICI)1099-0488(19970715)35:9<1449::AID-POLB15>3.0.CO;2-6 ↗
22. Adhesion of silicon oxide layers on poly(ethylene terephthalate). II: effect of coating thickness on adhesive and cohesive strengths10.1002/(SICI)1099-0488(19970715)35:9<1463::AID-POLB16>3.0.CO;2-4 ↗
23. Modeling of multiple cracking and decohesion of a thin film on a polymer substrate10.1016/j.engfracmech.2006.04.013 ↗
24. Statistical analysis of multiple cracking phenomenon of a SiOx thin film on a polymer substrate10.1063/1.1379355 ↗
25. The effect of film thickness variations in periodic cracking: analysis and experiments10.1016/j.surfcoat.2011.07.047 ↗
26. Thickness effect on the fracture and delamination of titanium films10.1016/j.tsf.2015.05.021 ↗
27. In situ electro-mechanical experiments and mechanics modeling of tensile cracking in indium tin oxide thin films on polyimide substrates10.1063/1.3592341 ↗
28. Mechanical integrity of thin inorganic coatings on polymer substrates under quasi-static, thermal and fatigue loadings10.1016/j.tsf.2010.06.003 ↗
29. Evaluation of toughness by finite fracture mechanics from crack onset strain of brittle coatings on polymers10.1016/j.tafmec.2007.11.002 ↗
30. Thickness dependent critical strain in submicron Cu films adherent to polymer substrate10.1063/1.2722684 ↗
31. Fracture of nanoscale copper films on elastomer substrates10.1063/1.3268458 ↗
32. In situ study of cracking and buckling of chromium films on PET substrates10.1007/s11340-010-9359-x ↗
33. An elevated temperature study of a Ti adhesion layer on polyimide10.1016/j.tsf.2013.01.016 ↗
34. Deformation behavior of Re alloyed Mo thin films on flexible substrates: in situ fragmentation analysis supported by first-principles calculations10.1038/s41598-017-07825-1 ↗
35. In-situ observations of the fracture and adhesion of Cu/Nb multilayers on polyimide substrates10.1016/j.msea.2018.08.043 ↗
36. Study on Young's modulus of thin films on Kapton by microtensile testing combined with dual DIC system10.1016/j.surfcoat.2016.07.114 ↗
37. Cyclic testing of thin Ni films on a pre-tensile compliant substrate10.1016/j.msea.2017.04.007 ↗
38. Fragmentation testing for ductile thin films on polymer substrates10.1080/09500839.2013.830792 ↗
39. Ag:TiN-coated polyurethane for dry biopotential electrodes: from polymer plasma interface activation to the first EEG measurements10.1002/ppap.201500063 ↗
40. An algorithm for computing linear four-point probe thickness correction factors10.1063/1.1394186 ↗
41. Experimental study and thermodynamic assessment of the Ag–Ti system10.1016/j.calphad.2005.09.002 ↗
42. Effect of Ti additions on the electrical resistivity of copper10.1016/S0921-5093(96)10578-5 ↗
43. High ductility of a metal film adherent on a polymer substrate10.1063/1.2108110 ↗
44. Young's modulus, fracture strain, and tensile strength of sputtered titanium thin films10.1016/j.tsf.2005.02.024 ↗
45. Ductile film delamination from compliant substrates using hard overlayers
46. Measuring electro-mechanical properties of thin films on polymer substrates10.1016/j.mee.2014.08.002 ↗
47. Cracking effects in squashable and stretchable thin metal films on PDMS for flexible microsystems and electronics10.1038/s41598-018-27798-z ↗