Thin film sulphides and oxides of 3d metals prepared from complex precursors by CVD

Abstract Iron, cobalt and manganese sulphide thin films have been prepared by CVD using Fe[(C 2 H 5 ) 2 NCS 2 ] 3 , Co[(C 2 H 5 ) 2 NCS 2 ] 3 and MnPhen[(C 2 H 5 ) 2 NCS 2 ] 2 complex compounds (CCs) as precursors. The respective oxides were prepared by annealing the sulphide thin films in the presence of oxygen (Fe 3 O 4 , Fe 2 O 3 , Co 3 O 4 and γ-Mn 3 O 4 ) or by CVD from the same precursor in Ar/O 2 atmosphere (Fe 3 O 4 , Fe 2 O 3 ). Thin film structure was investigated by high-resolution Grazing-Incidence X-ray Diffraction (GIXRD) at the DESY/HASYLAB (Hamburg, Germany). Chemical composition of thin films was studied by high-resolution Laser Ionization Mass Spectrometry (LIMS) technique. Magnetic structure of iron oxides and sulphides was characterized by Conversion Electron Mossbauer Spectroscopy (CEMS).