Template-Induced Growth of Sputter-Deposited Gold Nanoparticles on Ordered Porous TiO₂ Thin Films for Surface-Enhanced Raman Scattering Sensors

Ordered porous gold/titanium dioxide (Au/TiO2) hybrid nanostructured films are specifically interesting in large-scale applications using localized surface plasmon resonances (LSPRs) and surface-enhanced Raman scattering (SERS). Deposition of Au nanoparticles via sputter deposition is one of the promising technologies to establish optically active sites at low cost in combination with nanostructured TiO2 films. In this work, we investigate the optical response of sputter-deposited Au/TiO2 nanohybrid thin films with a focus on the plasmonic response and application as molecular sensors. The LSPR peak red shifts with an increasing thickness of deposited Au. The Raman intensity of deposited molecules, probed with rhodamine 6G (R6G), depends on the deposited gold thickness. It has its maximum at an effective Au thickness of 3.4 nm. To elucidate the origin of this behavior, we apply in situ grazing-incidence small-angle X-ray scattering (GISAXS) to investigate the growth kinetics of Au on a TiO2 template during sputter deposition. On the basis of time-resolved GISAXS, the growth characteristics of sputter-deposited Au on a TiO2 template with a final effective Au layer thickness around the percolation threshold is described with the well-known four-stage model of nucleation and cluster formation, diffusion-mediated growth, adsorption-mediated growth, and grain growth. The maximum in SERS intensity is corroborated by the existence and optimal size of hot spots in the narrow space occurring between the sputter-deposited Au clusters, on staying below the percolation threshold. On the basis of the growth laws extracted, we give a guideline for tailoring the ordered porous Au/TiO2 nanohybrid thin films for SERS sensor applications.