Effect of post-annealing on structural, tribological, and adhesion properties of TiW/TiWSi/TiWSiN graded composite films
Source abstract
Abstract
TiW/TiWSi/TiWSiN graded composite films were synthesized on AISI 52100 steel substrates by employing a radio frequency (RF)-powered magnetron sputtering technique. Following deposition, post-annealing was applied to the films at various temperatures. X-ray diffraction (XRD) analysis revealed that the films exhibited an amorphous structure prior to annealing. Upon heat treatment, the formation of TiN crystalline phases with various orientations and planes became dominant in the structure. The crystalline formations were identified and validated by means of X-ray photoelectron spectroscopy (XPS). The A-600 film exhibited the lowest values in both friction coefficient (0.13) and wear rate (2.16 × 10−6 mm3/(N·m)) among all samples. Given these results, the A-600 film demonstrated notable wear resistance and exhibited the best tribological performance among the tested samples. Furthermore, heat treatment was found to improve adhesion performance; however, it was evident that the treatment temperature must be carefully optimized. While only the A-600 film remained intact after the scratch test, the presence of microcracks and cohesive failures in the other films indicated a loss of structural integrity. This study revealed that Ti-W-Si-N-containing films can achieve enhanced hardness, tribological, and adhesion properties following an appropriate heat treatment.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Advanced materials and composites · Diamond and Carbon-based Materials Research
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (68)
Show source-provided references
1. Multicomponent nanostructured films for various tribological applications10.1016/j.ijrmhm.2009.07.014 ↗
2. Multicomponent and multiphase hard coatings for tribological applications10.1016/S0257-8972(00)00783-0 ↗
3. Investigation of wettability and antimicrobial activity of Ti-Cu and Ti-Ag thin film metallic glasses coated on the surface of 316L, CoCrW, Ti6Al4V alloy substrates produced by selective laser melting10.1016/j.tsf.2025.140605 ↗
4. Improvement of structural/tribological properties and milling performances of tungsten carbide cutting tools by bilayer TiAlN/TiSiN and monolayer AlCrSiN ceramic films10.1016/j.ceramint.2022.05.318 ↗
5. Tribological and machining performance of tungsten carbide cutting tool material coated with different carbon nitride films10.1504/IJSURFSE.2022.125450 ↗
6. Deposition and characterization of titanium aluminum nitride coatings prepared by RF magnetron sputtering10.1016/j.apsusc.2015.02.053 ↗
7. Surface characteristics for the TiAlN coatings deposited by high power impulse magnetron sputtering technique at the different bias voltages10.1016/j.jallcom.2016.07.013 ↗
8. Nanostructured TiCrN thin films by pulsed Magnetron Sputtering for cutting tool applications10.1016/j.ceramint.2016.03.095 ↗
9. Structural and mechanical properties of Nb1− xTixN thin films deposited by rf magnetron sputtering10.1016/j.tsf.2016.03.042 ↗
10. Composite materials with nanoscale multilayer architecture based on cathodic-arc evaporated WN/NbN coatings
11. Alloying effects on the structure and elastic properties of hard coatings based on ternary transition metal (M= Ti, Zr or Ta) nitrides10.1016/j.surfcoat.2014.08.022 ↗
12. Effect of bias on the structure and properties of TiZrN thin films deposited by unbalanced magnetron sputtering10.1016/j.tsf.2016.05.021 ↗
13. Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: structure, properties, first-principles calculations10.1016/j.matchar.2017.10.016 ↗
14. A review paper on tribological and mechanical properties of ternary nitride based coatings10.1016/j.protcy.2014.08.055 ↗
15. Effect of codeposition parameters on the hardness and adhesion of TiVN coatings10.1016/j.ceramint.2015.05.046 ↗
16. Influence of deposition temperature on WTiN coatings tribological performance10.1016/j.apsusc.2017.07.215 ↗
17. Improving the physicochemical surface properties on AISI D3 steel coated with Ti-WN10.1016/j.surfcoat.2010.11.005 ↗
18. Structural and electrical properties of Ti-WN thin films deposited by reactive RF sputtering10.1016/j.phpro.2011.06.059 ↗
19. Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition10.1007/BF01447027 ↗
20. Different approaches to superhard coatings and nanocomposites10.1016/j.tsf.2004.10.053 ↗
21. Search for superhard materials: nanocrystalline composites with hardness exceeding 50 GPa10.1016/S0965-9773(98)00106-8 ↗
22. Industrial applications of superhard nanocomposite coatings10.1016/j.surfcoat.2008.05.038 ↗
23. Structural and tribological properties of TiSiN films with different Si content10.1016/j.tsf.2023.140059 ↗
24. Mechanical properties and oxidation resistance of nanocomposite TiN–SiNx physical-vapor-deposited thin films10.1016/S0257-8972(99)00481-8 ↗
25. Characterisation of Ti1− xSixNy nanocomposite films10.1016/S0257-8972(00)00947-6 ↗
26. High Si content TiSiN films with superior oxidation resistance10.1016/j.surfcoat.2020.126087 ↗
27. The role of percolation threshold for the control of the hardness and thermal stability of super-and ultrahard nanocomposites10.1016/S0257-8972(01)01469-4 ↗
28. Thermal stability of superhard nanocomposite coatings consisting of immiscible nitrides10.1016/S0257-8972(01)01474-8 ↗
29. Structure, mechanical and thermal properties of TiSiWN coatings10.3390/coatings13010119 ↗
30. Effect of nitrogen flow ratio on microstructure, mechanical and tribological properties of TiWSiNx thin film deposited by magnetron co-sputtering10.1016/j.apsusc.2018.06.129 ↗
31. Effect of lanthanum addition on the structure evolution and mechanical properties of the nanocomposite Ti-Si-N coatings10.1016/j.matlet.2020.128180 ↗
32. Effect of carbon addition on tribological performance of TiSiN coatings produced by cathodic arc physical vapour deposition10.1016/j.surfcoat.2020.126781 ↗
33. Mechanical and corrosion-resistant properties of ti–nb–si–n nanocomposite films prepared by a double glow discharge plasma technique10.1016/j.ceramint.2014.01.079 ↗
34. Towards energy-efficient physical vapor deposition: mapping out the effects of W+ energy and concentration on the densification of TiAlWN thin films grown with no external heating10.1016/j.surfcoat.2021.127639 ↗
35. Dense, single-phase, hard, and stress-free Ti0. 32Al0. 63W0. 05N films grown by magnetron sputtering with dramatically reduced energy consumption10.1038/s41598-022-05975-5 ↗
36. Arc evaporated W-alloyed Ti-Al-N coatings for improved thermal stability, mechanical, and tribological properties10.1016/j.surfcoat.2017.05.097 ↗
37. Improvement of oxidation resistance of Ti–47Al–2W–0.5 Si alloy modified by aluminizing method10.1016/j.surfcoat.2015.07.072 ↗
38. Insights and Optimization of the Structural and Mechanical Properties of TiWSiN Coatings using the Taguchi method10.1016/j.apsusc.2021.149877 ↗
39. Improving superficial microstructure and properties of the laser-processed ultrathin kerf in Ti-6Al-4V alloy by water-jet guiding10.1016/j.jmst.2022.11.058 ↗
40. Investigation of hardness, tribological and adhesion properties of TiAlNiVN HEA films heat treated at different temperatures10.1016/j.triboint.2024.109739 ↗
41. Copper diffusion in ti–si–n layers formed by inductively coupled plasma implantation10.1016/j.apsusc.2005.12.152 ↗
42. Effects of various double-quenching treatments on the microstructure and corrosion properties of D2 tool steel10.1016/j.ijpvp.2023.104915 ↗
43. A reactive-sputter-deposited TiSiN nanocomposite coating for the protection of metallic bipolar plates in proton exchange membrane fuel cells10.1016/j.ceramint.2019.09.263 ↗
44. Micro structure and properties of TiSiN films prepared by plasma-enhanced chemical vapor deposition10.1016/0254-0584(95)01655-E ↗
45. Interfacial structure, mechanical properties, and corrosion resistance of Cr/TiSiN nano-multilayer coating by filtered cathode vacuum arc technique10.1016/j.jmapro.2025.01.076 ↗
46. The effect of phase on microstructure and mechanical performance in TiAlN and TiSiN films10.1088/2053-1591/ab96f6 ↗
47. Tribological and micromechanical performance of hard yet tough TiSiN/WN coatings: an experimental analysis of multilayer effects10.1016/j.ijrmhm.2025.107212 ↗
48. X-ray photoelectron spectroscopy: towards reliable binding energy referencing10.1016/j.pmatsci.2019.100591 ↗
49. Controllable synthesis and tunable photocatalytic properties of Ti3+-doped TiO210.1038/srep10714 ↗
50. XPS analysis of Ti6Al4V oxidation under UHV conditions10.1007/s11661-014-2570-0 ↗
51. Elucidating the structure of bimetallic NiW/SiO2 catalysts and its consequences on selective deoxygenation of m-cresol to toluene10.1021/acscatal.0c05560 ↗
52. Effect of growth time on structural, morphological and electrical properties of tungsten oxide nanowire10.1007/s00339-018-1955-0 ↗
53. The effects of nanoscaled amorphous Si and SiNx protective layers on the atomic oxygen resistant and tribological properties of Ag film10.1016/j.apsusc.2012.02.062 ↗
54. Characterization of nitride coatings by XPS10.1016/S0257-8972(01)01619-X ↗
55. Investigation of Fe/Al interface as a function of annealing temperature using XPS10.1016/j.apsusc.2009.01.070 ↗
56. Coefficients of friction of TiN coatings with preferred grain orientations under dry condition10.1016/j.wear.2008.02.019 ↗
57. Microstructure, interface and hardness of Ti/TiN nanolayered coatings
58. Nanoindentation studies of single‐crystal (001)‐,(011)‐, and (111)‐oriented TiN layers on MgO10.1063/1.363799 ↗
59. The inverse hall–petch effect in nanocrystalline ZrN coatings10.1016/j.surfcoat.2011.01.021 ↗
60. Mechanical properties of nanocrystalline materials10.1016/j.pmatsci.2005.08.003 ↗
61. Nanomechanics of Hall–Petch relationship in nanocrystalline materials10.1016/j.pmatsci.2009.03.008 ↗
62. Elastic and tensile behavior of nanocrystalline copper and palladium10.1016/S1359-6454(97)00092-X ↗
63. Microstructural design of hard coatings10.1016/j.pmatsci.2006.02.002 ↗
64. Microstructure and mechanical/thermal properties of Cr–N coatings deposited by reactive unbalanced magnetron sputtering10.1016/S0257-8972(01)01090-8 ↗
65. Structure and properties of TiN (111)∕ Si x N y∕ TiN (111) interfaces in superhard nanocomposites: First-principles investigations10.1103/PhysRevB.74.035402 ↗
66. Origin of the hardness enhancement in superhard nc-TiN/a-Si3N4 and ultrahard nc-TiN/a-Si3N4/TiSi2 nanocomposites10.1080/09500830701666139 ↗
67. Annealing effect on tribological property of arc-deposited TiN film on 316L austenitic stainless steel10.1016/j.surfcoat.2014.02.001 ↗
68. Graded coatings for thermal, wear and corrosion barriers10.1016/S0921-5093(03)00579-3 ↗