Engineering and Tuning of High Quality Hexagonal Boron Nitride Nanophotonic Resonators

ABSTRACT Van der Waals materials offer intriguing opportunities as building blocks for advanced quantum information technologies and integrated quantum photonic systems. Critical to their development are robust and high quality light‐matter interactions, which can be delivered through the fabrication of optical resonators. Here we demonstrate a robust fabrication of one dimensional photonic crystal cavities (1D PCC) and microdisk resonators from hexagonal boron nitride, exhibiting quality factors of ∼4300 and ∼8300, respectively. With these two resonator classes we demonstrated cavity mode tuning via atomic layer deposition and gas condensation. Cavity resonances were shifted by and ∼9 nm for the 1D PCCs and ∼16 nm in the microdisk resonators, respectively. Our work opens a promising pathway for a realization of emitter–cavity coupling in hBN and eventually toward fully integrated quantum photonic circuitry with hBN.