Enhanced Selectivity of Hydrogen Sulfide Gas by Hybrid Zeolitic Imidazolate Framework‐67/2D Platinum Diselenide‐Based Sensors Toward Wafer‐Scale Production

ABSTRACT We developed a novel hybrid gas sensor by integrating zeolitic imidazolate framework‐67 (ZIF‐67) onto platinum diselenide (PtSe ₂ ) layered thin films, synthesized via a plasma‐assisted selenization process. This approach addresses the critical challenge of scalability in 2D material‐based sensors. By leveraging the distinct adsorption energies of gas molecules at the metal centers in ZIF‐67, the sensors exhibited a significantly enhanced H ₂ S response of up to 163% at 10 ppm and remarkable selectivity against NH ₃ , achieving a response ratio (S _H2S /S _NH3 ) of 10.9. We calculated a theoretical limit of detection (LOD) of 12 ppb, demonstrating suitability for trace‐level environmental monitoring. Long‐term stability tests over a month demonstrated the superior stability of ZIF‐67@PtSe ₂ layered films compared to pristine PtSe ₂ , while maintaining robust performance under high‐temperature and high‐humidity conditions. Density functional theory (DFT) calculations revealed that ZIF‐67 acts as a molecular sieve, selectively capturing H ₂ S while hindering access to NH ₃ , elucidating the underlying mechanism for the enhanced selectivity. Crucially, we successfully demonstrated the fabrication of a 4‐inch wafer‐scale device featuring a highly uniform ZIF‐67@PtSe ₂ layered thin film that exhibited excellent gas‐sensing performance. These results validate the feasibility and potential for large‐scale, high‐volume manufacturing of ZIF‐67@PtSe ₂ sensors, bridging the gap between laboratory‐scale devices and commercial applications.