journal article·2026-04

Direct Pattern‐to‐Curve PDMS‐Based Microstructures Fabrication via Thermal Air Expansion for Micro‐Optics

Md Emamul Kabir, Sonali Garg, Paras N. Prasad, Kwang W. Oh

Small· Volume 22· Issue 24
Publisher page

Abstract

ABSTRACT Microlens arrays (MLAs) are widely used in imaging, sensing, and photonics, yet conventional fabrication strategies such as thermal reflow and grayscale lithography typically require fully equipped cleanrooms, expensive tools, and multi‐step processing. Here, we present a rapid, cost‐effective, benchtop‐based fabrication method that employs isotropic heated air pressure to transform directly SU‐8/silicon patterns into smooth, curved PDMS MLAs. The fabricated lenses exhibit optical‐grade surfaces, with measured roughness values ranging from ∼0.608 to 4.47 nm (mean value between 1.18 ± 0.48 and 3.3 ± 0.9 nm). Optical characterization revealed tunable focal lengths spanning 127.21–683.05 µm and transmittance of 83.06% for high‐curvature patterns, considering scattering and Fresnel losses. A simple double‐casting step yielded convex counterparts, and proof‐of‐concept imaging with both concave‐convex arrays and with fabricated compound eye confirmed the functionality of the MLAs. By reducing equipment complexity and processing time, this approach provides a reproducible and cost‐effective alternative for scalable MLAs manufacturing.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Advanced optical system design · Electrowetting and Microfluidic Technologies · Adaptive optics and wavefront sensing

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

SMALL (Sensors and MicroActuators Learning Lab) Department of Electrical Engineering University at Buffalo The State University of New York at Buffalo (SUNY‐Buffalo) Buffalo New York USA

Department of Chemistry University at Buffalo The State University of New York (SUNY-Buffalo) Buffalo New York USA

The Institute for Lasers Photonics, and Biophotonics University at Buffalo The State University of New York (SUNY-Buffalo) Buffalo New York USA

Department of Biomdical Engineering, University at Buffalo The State University of New York (SUNY-Buffalo) Buffalo New York USA

References (52)

Show source-provided references
1. 10.1038/s41467‐024‐50008‐610.1038/s41467‐024‐50008‐6 ↗
2. 10.3390/jfb1301000210.3390/jfb13010002 ↗
3. 10.1002/elps.20230010110.1002/elps.202300101 ↗
4. 10.1016/j.aca.2025.34379310.1016/j.aca.2025.343793 ↗
5. 10.3390/mi1502024010.3390/mi15020240 ↗
6. 10.3390/s2418587210.3390/s24185872 ↗
7. 10.1126/scirobotics.adl360610.1126/scirobotics.adl3606 ↗
8. 10.1016/j.sbsr.2025.10080810.1016/j.sbsr.2025.100808 ↗
9. 10.1364/AO.56721910.1364/AO.567219 ↗
10. 10.1016/j.optlastec.2025.11317910.1016/j.optlastec.2025.113179 ↗
11. Holographic Laser Fabrication of 3D Artificial Compound µ‐eyes
12. 10.1016/j.optlastec.2020.10673810.1016/j.optlastec.2020.106738 ↗
13. 10.1364/OE.20.01293910.1364/OE.20.012939 ↗
14. 10.3390/mi1506079510.3390/mi15060795 ↗
15. 10.1016/j.optlaseng.2019.10587210.1016/j.optlaseng.2019.105872 ↗
16. 10.1364/OE.38892110.1364/OE.388921 ↗
17. 10.1088/0960‐1317/24/1/01501610.1088/0960‐1317/24/1/015016 ↗
18. 10.1021/acsami.7b0076610.1021/acsami.7b00766 ↗
19. 10.1016/j.snb.2016.05.00810.1016/j.snb.2016.05.008 ↗
20. 10.1364/OL.44834410.1364/OL.448344 ↗
21. 10.1088/0960‐1317/23/6/06500810.1088/0960‐1317/23/6/065008 ↗
22. 10.1002/admt.20240001610.1002/admt.202400016 ↗
23. 10.1021/acs.langmuir.3c0245410.1021/acs.langmuir.3c02454 ↗
24. 10.1021/am402923t10.1021/am402923t ↗
25. 10.1364/AO.38318910.1364/AO.383189 ↗
26. 10.1016/j.optlaseng.2024.10823910.1016/j.optlaseng.2024.108239 ↗
27. 10.1021/acsami.2c2019110.1021/acsami.2c20191 ↗
28. 10.1021/acs.langmuir.2c0007910.1021/acs.langmuir.2c00079 ↗
29. 10.1021/acsami.6b0538510.1021/acsami.6b05385 ↗
30. 10.1002/smll.20240609210.1002/smll.202406092 ↗
31. 10.1016/j.apsusc.2025.16427010.1016/j.apsusc.2025.164270 ↗
32. 10.1002/adom.20220067710.1002/adom.202200677 ↗
33. 10.3390/mi502027510.3390/mi5020275 ↗
34. C.KimandM.Lee “Microlens Array‐Based Plenoptic Microscopy for High‐Precision 3D imaging ” inThree‐Dimensional Imaging Visualization and Display 2025 ed.X.Shen B.Javidi andA.Anand (SPIE 2025) 52 https://doi.org/10.1117/12.3053914.10.1117/12.3053914 ↗
35. 10.2139/ssrn.510133710.2139/ssrn.5101337 ↗
36. 10.1021/acs.langmuir.2c0261410.1021/acs.langmuir.2c02614 ↗
37. 10.61091/jcmcc118‐1510.61091/jcmcc118‐15 ↗
38. 10.1109/JMEMS.2003.81172410.1109/JMEMS.2003.811724 ↗
39. E. J.Wong “Modeling and Control of Rapid Cure in Polydimethylsiloxane (PDMS) for Microfluidic Device Applications ” (master's thesis Massachusetts Institute of Technology 2010) https://dspace.mit.edu/handle/1721.1/61615.
40. 10.3365/KJMM.2019.57.5.28910.3365/KJMM.2019.57.5.289 ↗
41. 10.1002/app.5101310.1002/app.51013 ↗
42. 10.1364/OE.54987910.1364/OE.549879 ↗
43. 10.1007/s10854‐017‐6498‐110.1007/s10854‐017‐6498‐1 ↗
44. 10.1088/0960‐1317/17/6/R0110.1088/0960‐1317/17/6/R01 ↗
45. 10.1016/j.optlastec.2024.11217610.1016/j.optlastec.2024.112176 ↗
46. 10.1007/s00170‐024‐13350‐z10.1007/s00170‐024‐13350‐z ↗
47. 10.1117/1.OE.51.1.01340210.1117/1.OE.51.1.013402 ↗
48. 10.1068/p19007910.1068/p190079 ↗
49. 10.1364/AO.54.00736610.1364/AO.54.007366 ↗
50. 10.1016/j.snb.2015.12.07010.1016/j.snb.2015.12.070 ↗
51. 10.1016/j.apsusc.2019.14437510.1016/j.apsusc.2019.144375 ↗
52. 10.1016/j.snb.2019.04.14510.1016/j.snb.2019.04.145 ↗