journal article·2024-05Open access

Tip‐based Lithography with a Sacrificial Layer (Small 19/2024)

Jeong‐Sik Jo, Jinho Lee, Chiwon Choi, Jae‐Won Jang

Small· Volume 20· Issue 19

Abstract

Tip-Based Lithography In article number 2309484, Jae-Won Jang and co-workers report the tip-based lithography with a sacrificial layer. The sacrificial layer minimizes the scratching of the gold film by nano-indentation during tip-based lithography, which enables the fabrication of sub-50 nm-sized gold nanoholes. A single 20 nm diameter gold particle was trapped in a 35 nm diameter gold nanohole via wettability-controlled self-assembly. This structure causes strong electromagnetic wave enhancement and can be utilized in surface-enhanced Raman scattering.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Nanofabrication and Lithography Techniques

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Affiliations

Division of Physics and Semiconductor Science Dongguk University Seoul 04620 Republic of Korea

References

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