Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023)
Abstract
Research context
OpenAlex topics: Silicon Nanostructures and Photoluminescence
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Affiliations
Institute for Materials and X‐Ray Physics Hamburg University of Technology Denickestr. 10 21073 Hamburg Germany
Center for X‐Ray and Nano Science CXNS Deutsches Elektronen‐Synchrotron DESY Notkestr. 85 22607 Hamburg Germany
Centre for Hybrid Nanostructures CHyN, University of Hamburg 22607 Hamburg Germany
Institute of Metallic Biomaterials Helmholtz Zentrum Hereon 21502 Geesthacht Germany
Electron Microscopy Unit Hamburg University of Technology 21073 Hamburg Germany
Elettra ‐ Sincrotrone Trieste S.C.p.A. Strada Statale 14 ‐ km 163,5 in AREA Science Park 34149 Basovizza Italien
Institute of Materials Physics Helmholtz Zentrum Hereon 21502 Geesthacht Germany
References
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