journal article·2023-06Open access

Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023)

Stella Gries, Manuel Brinker, Berit Zeller‐Plumhoff, Dagmar Rings, Tobias Krekeler, Elena Longo, Imke Greving, Patrick Huber

Small· Volume 19· Issue 22

Abstract

Porous Silica In article number 2206842, Stella Gries, Patrick Huber, and co-workers present a novel approach based on silver nanoparticle-assisted chemical etching (MACE) of macroporous silicon for the synthesis of hierarchically porous silicon. The MACE process is mainly guided by a metal-catalyzed redox-reaction where silver nanoparticles drill mesopores into the silicon scaffold structure. The resulting porous silicon can be transformed structure-conserving by thermal oxidation to hierarchically porous silica glass.
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Research context

OpenAlex topics: Silicon Nanostructures and Photoluminescence

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Affiliations

Institute for Materials and X‐Ray Physics Hamburg University of Technology Denickestr. 10 21073 Hamburg Germany

Center for X‐Ray and Nano Science CXNS Deutsches Elektronen‐Synchrotron DESY Notkestr. 85 22607 Hamburg Germany

Centre for Hybrid Nanostructures CHyN, University of Hamburg 22607 Hamburg Germany

Institute of Metallic Biomaterials Helmholtz Zentrum Hereon 21502 Geesthacht Germany

Electron Microscopy Unit Hamburg University of Technology 21073 Hamburg Germany

Elettra ‐ Sincrotrone Trieste S.C.p.A. Strada Statale 14 ‐ km 163,5 in AREA Science Park 34149 Basovizza Italien

Institute of Materials Physics Helmholtz Zentrum Hereon 21502 Geesthacht Germany

References

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