journal article·2022-07

A Resonant Graphene NEMS Vibrometer (Small 28/2022)

Daniel Moreno‐Garcia, Xuge Fan, Anderson D. Smith, Max C. Lemme, Vincenzo Messina, Cristina Martin‐Olmos, Frank Niklaus, Luis Guillermo Villanueva

Small· Volume 18· Issue 28
Publisher page

Abstract

Vibration Measurement In article number 2201816, Frank Niklaus, Luis Guillermo Villanueva, and co-workers propose a nano-electromechanical (NEMS) resonant vibration sensor based on double-layer graphene membranes. These sensors have a very small footprint but still, boast responsivities up to six orders of magnitude larger than expected based on the inertial model. The excellent responsivities are due to the bending effect of the chip, which can have important implications for related experimental work.
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Research context

OpenAlex topics: Advanced MEMS and NEMS Technologies · Mechanical and Optical Resonators · Advanced Fiber Optic Sensors

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Advanced NEMS Group École Polytechnique Féderale de Lausanne (EPFL) Lausanne 1015 Switzerland

Division of Micro and Nanosystems School of Electrical Engineering and Computer Science KTH Royal Institute of Technology Stockholm SE‐10044 Sweden

Adv. Research Institute of Multidisciplinary Sciences Beijing Institute of Technology Beijing 100081 China

Department of Electrical Engineering Chalmers University of Technology Gothenburg 41296 Sweden

Chair of Electronic Devices Faculty of Electrical Engineering and Information Tech RWTH Aachen University 52074 Aachen Germany

Swiss Integrative Center for Human Health (SICHH) Fribourg 1700 Switzerland

References

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