Engineering Stress in Thin Films: An Innovative Pathway Toward 3D Micro and Nanosystems (Small 4/2022)
Source abstract
Abstract
Stress Engineering In article number 2105748, Hoang-Phuong Phan and co-workers summarize state-of-the-art technologies in stress engineering for the development of innovative 3D micro- and nano-architectures. A broad range of applications including sensors, optical systems, bioelectronics interfaces, micro robots, and implantable and wearable devices are highlighted.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Advanced Sensor and Energy Harvesting Materials
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Affiliations
Queensland Micro and Nanotechnology Centre Griffith University, Nathan Queensland 4111 Australia
Department of Aerospace and Mechanical Engineering University of Southern California Los Angeles CA 90089 USA
Centre for Future Materials University of Southern Queensland Ipswich Queensland 4305 Australia
Querrey Simpson Institute for Bioelectronics Northwestern University Evanston IL 60208 USA
Australian Institute for Bioengineering and Nanotechnology The University of Queensland Brisbane Queensland 4072 Australia
References
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