Nanopatterning: Graphoepitaxy of Block‐Copolymer Self‐Assembly Integrated with Single‐Step ZnO Nanoimprinting (Small 10/2012)
Source abstract
Abstract
The cover image features a highly efficient nanolithography technique with a minimal number of processing steps, integrating directed block-copolymer self-assembly with single-step ZnO nanoimprinting. Diverse shapes of the ZnO patterns are readily attainable by UV-assisted, single-step imprinting of sol–gel precursors. The ZnO provides high thermal stability and low line-edge roughness, both of which are crucial for further directed blockcopolymer assembly. According to the ZnO trench shape, various self-assembled nanoscale morphologies—such as surface-parallel nanocylinder arrays, hierarchical nanopatterns of surface-parallel and vertical cylinder arrays, and co-axial nano-ring arrays—can be formed in the graphoepitaxially assembled block-copolymer thin films. For more information, please read the Full Paper “Graphoepitaxy of Block-Copolymer Self-Assembly Integrated with Single-Step ZnO Nanoimprinting” by S. O. Kim, J.-H. Jeong, and co-workers, beginning on page 1563.
Source: openalex_inverted_index · Quality: baseline
Research context
OpenAlex topics: Block Copolymer Self-Assembly · Advanced Polymer Synthesis and Characterization
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References
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