journal article·2012-05-21Open access

Nanopatterning: Graphoepitaxy of Block‐Copolymer Self‐Assembly Integrated with Single‐Step ZnO Nanoimprinting (Small 10/2012)

Sarah Kim, Dong Ok Shin, Dae‐Geun Choi, Jong‐Ryul Jeong, Jeong Ho Mun, Yong‐Biao Yang, Jaeup U. Kim, Sang Ouk Kim, Jun‐Ho Jeong

Small· Volume 8· Issue 10

Abstract

The cover image features a highly efficient nanolithography technique with a minimal number of processing steps, integrating directed block-copolymer self-assembly with single-step ZnO nanoimprinting. Diverse shapes of the ZnO patterns are readily attainable by UV-assisted, single-step imprinting of sol–gel precursors. The ZnO provides high thermal stability and low line-edge roughness, both of which are crucial for further directed blockcopolymer assembly. According to the ZnO trench shape, various self-assembled nanoscale morphologies—such as surface-parallel nanocylinder arrays, hierarchical nanopatterns of surface-parallel and vertical cylinder arrays, and co-axial nano-ring arrays—can be formed in the graphoepitaxially assembled block-copolymer thin films. For more information, please read the Full Paper “Graphoepitaxy of Block-Copolymer Self-Assembly Integrated with Single-Step ZnO Nanoimprinting” by S. O. Kim, J.-H. Jeong, and co-workers, beginning on page 1563.
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Research context

OpenAlex topics: Block Copolymer Self-Assembly · Advanced Polymer Synthesis and Characterization

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