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journal article·2015-11Open access

Patterning: Atomic‐Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision (Small 44/2015)

Stephen Jesse, Qian He, Andrew R. Lupini, Donovan N. Leonard, Mark P. Oxley, Oleg Ovchinnikov, Raymond R. Unocic, Alexander Tselev, Miguel Fuentes‐Cabrera, Bobby G. Sumpter, Stephen J. Pennycook, Sergei V. Kalinin, Albina Y. Borisevich

Small· Volume 11· Issue 44
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Source abstract

Abstract

On page 5895, Q. He, A. Y. Borisevich, and co-workers describe how an aberration-corrected e-beam in a scanning transmission electron microscope can be used to crystallize amorphous complex oxides with atomic plane precision. Using this control system, epitaxial growth of SrTiO3 is achieved to pattern text onto a 90 × 25 nm area, as shown in the image. Each feature shown is about 20 unit cells (about 8 nm) wide.
Source: openalex_inverted_index · Quality: baseline

Research context

Nanomaterials

OpenAlex topics: Electron and X-Ray Spectroscopy Techniques · Advanced Electron Microscopy Techniques and Applications · Electronic and Structural Properties of Oxides

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Affiliations

Institute for Functional Imaging of Materials Oak Ridge National Laboratory Oak Ridge TN 37831 USA

The Center for Nanophase Materials Science Oak Ridge National Laboratory Oak Ridge TN 37831 USA

Materials Sciences and Technology Division Oak Ridge National Laboratory Oak Ridge TN 37831 USA

Department of Physics and Astronomy Vanderbilt University Nashville TN 37235 USA

Computer Science and Mathematics Division Oak Ridge National Laboratory Oak Ridge TN 37831 USA

Department of Materials Science and Engineering National University of Singapore Singapore 117575 Singapore

References

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