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journal article·2020-06Open access

Zinc Oxide: From Precursor Chemistry to Gas Sensors: Plasma‐Enhanced Atomic Layer Deposition Process Engineering for Zinc Oxide Layers from a Nonpyrophoric Zinc Precursor for Gas Barrier and Sensor Applications (Small 22/2020)

Lukas Mai, Felix Mitschker, Claudia Bock, Alessia Niesen, Engin Ciftyurek, Detlef Rogalla, Johannes Mickler, Matthias Erig, Zheshen Li, Peter Awakowicz, Klaus Schierbaum, Anjana Devi

Small· Volume 16· Issue 22
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Source abstract

Abstract

In article number 1907506, Anjana Devi and co-workers introduce a new, nonpyrophoric zinc precursor for plasma enhanced atomic layer deposition (PEALD) of zinc oxide (ZnO). Here, oxygen plasma is used to react with adsorbed zinc precursor on chemiresistor structures to form highly pure ZnO which is used effectively as a selective gas sensing layer for NO2 in a functional gas sensor device.
Source: openalex_inverted_index · Quality: baseline

Research context

Materials processing

OpenAlex topics: Gas Sensing Nanomaterials and Sensors

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Affiliations

Inorganic Materials Chemistry Ruhr University Bochum Universitätsstr. 150 Bochum 44801 Germany

Institute of Electrical Engineering and Plasma Technology Ruhr University Bochum Universitätsstr. 150 Bochum 44801 Germany

Microsystems Technology Ruhr University Bochum Universitätsstr. 150 Bochum 44801 Germany

Forschung und Entwicklung, GB Sensorik paragon GmbH & Co KGaA Schwalbenweg 29 Delbrück 33129 Germany

Department of Material Science Institute of Experimental Condensed Matter Physics Heinrich Heine University Düsseldorf Universitätsstr. 1 Düsseldorf 40225 Germany

RUBION Ruhr University Bochum Universitätsstr. 150 Bochum 44801 Germany

Department of Physics and Astronomy – Centre for Storage Ring Facilities (ISA) Aarhus University Aarhus 8000 Denmark

References

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