journal article·2009-11-16

Reactive Ion Etching of Gold‐Nanoparticle‐Modified Pyrolyzed Photoresist Films

Ronen Polsky, Cody M. Washburn, Gabriel Montano, Haiqing Liu, Thayne L. Edwards, DeAnna M. Lopez, Jason C. Harper, Susan M. Brozik, David R. Wheeler

Small· Volume 5· Issue 22
Publisher page

Abstract

Under similar electrodeposition conditions the unique surface properties of pyrolyzed photoresist films result in smaller gold nanoparticles with a higher density when compared to other common electrode materials. Reactive ion etching of such surfaces results in the formation of unique AuNP-capped pyramidal carbon structures (see image).
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Research context

OpenAlex topics: Electrochemical Analysis and Applications · Electrocatalysts for Energy Conversion · Ion-surface interactions and analysis

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