journal article·2006-04Open access

Easy Writing of Nanopatterns on a Polymer Film Using Electrostatic Nanolithography

Subbiah Jegadesan, Swaminathan Sindhu, Suresh Valiyaveettil

Small· Volume 2· Issue 4

Abstract

Writing high and low! Atomic force microscopy (AFM) is used to fabricate nanolines and nanopits (see Figure) on a poly(methacrylic acid) (PMAA) film deposited on a Si(100) substrate. The kinetics and growth of the nanopattern from the polymer film are investigated by electrostatic nanolithography by using different applied voltages, duration of patterning, and speed of the AFM tip.
Source: openalex_inverted_index · Quality: baseline

Research context

OpenAlex topics: Nanofabrication and Lithography Techniques · Force Microscopy Techniques and Applications · Molecular Junctions and Nanostructures

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

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